First Sensor has launched high-accuracy capacitive silicon inertial sensors aimed at applications in the fast-growing market of smart structural monitoring. The sensors offer the resolution and low-noise density required for recording vibrations or changes of inclination in wind turbines, bridges and high-rise buildings, thereby uncovering risks in the structure or material at an early stage. Integrated in smart solutions, these cost-effective sensors ensure the safety of structures in everyday operation and following storms, earthquakes, large loads or changes in the foundations. The sensors for measuring tilt, acceleration and vibration consist of a silicon sensor element made in accordance with a patented micromechanical process (HARMS, AIM) in conjunction with a signal-processing ASIC in a hermetically sealed SMD housing.
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